Two Co-based superalloy subsystems, the ternary system Co-Al-Cr and the quasi-ternary system Co-Al-Cr-W with a constant amount of 10 at. % W, were deposited as thin-film materials libraries and analyzed in terms of phase formation and oxidation behavior at 500 °C in air. By combining energy-dispersive X-ray analysis and X-ray photoelectron spectroscopy high-throughput composition measurements, a detailed evaluation of the dependence between the initial multinary metal composition and the oxide scale composition which is forming upon oxidation on the surface of the thin film is established. Phase maps for both materials libraries are provided by high-throughput X-ray diffraction. In addition, the oxidation of a Co-Al-Cr-W bulk sample was analyzed and compared to a corresponding film in the library.
Keywords: EDX; XPS; materials library; oxidation; superalloy; thin film.