Integrating graphene into semiconductor fabrication lines

Nat Mater. 2019 Jun;18(6):525-529. doi: 10.1038/s41563-019-0359-7.

Authors

Daniel Neumaier¹, Stephan Pindl², Max C Lemme^{3

4}

Affiliations

¹ AMO GmbH, Aachen, Germany. [email protected].
² Infineon Technologies AG, Regensburg, Germany.
³ AMO GmbH, Aachen, Germany.
⁴ Chair for Electronic Devices, RWTH Aachen University, Aachen, Germany.

PMID: 31114067
DOI: 10.1038/s41563-019-0359-7

No abstract available

Publication types

Research Support, Non-U.S. Gov't