The performance of MoS2 based devices is closely related to the quality and defect morphology of the monolayer MoS2 deposited on metal. First-principles calculations were performed to investigate the vacancy effects of Au-mMoS2 contact. Four possible S-vacancy and a Mo-vacancy were considered in our calculations. Energetic studies show that S-vacancies are easier to form than Mo-vacancy in Au-mMoS2 contact, while S-vacancy (hollow site at interface, VS4) has the lowest formation energy under Mo-rich environments. Electron and charge redistribution analysis of defective Au-mMoS2 contact indicate that the lower contact resistance and higher electron injection efficiency of defective Au-MoS2 contact than perfect ones. Notably, the S-vacancy at top layer showed better electronic performance than that at bottom layer of monolayer MoS2 in the contact. High quality n-type Au-mMoS2 contact can therefore be expected through defect engineering.
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