Generation and Modulation of Controllable Multi-Focus Array Based on Phase Segmentation

Zihan Liu; Jiaqing Hou; Yu Zhang; Tong Wen; Lianbin Fan; Chen Zhang; Kaige Wang; Jintao Bai

doi:10.3390/mi13101677

Generation and Modulation of Controllable Multi-Focus Array Based on Phase Segmentation

Micromachines (Basel). 2022 Oct 5;13(10):1677. doi: 10.3390/mi13101677.

Authors

Zihan Liu¹, Jiaqing Hou¹, Yu Zhang², Tong Wen¹, Lianbin Fan³, Chen Zhang¹, Kaige Wang¹, Jintao Bai¹

Affiliations

¹ State Key Laboratory of Photon-Technology in Western China Energy, International Collaborative Center on Photoelectric Technology and Nano Functional Materials, Key Laboratory of Optoelectronics Technology in Shaanxi Province, Institute of Photonics & Photon Technology, Northwest University, Xi'an 710069, China.
² USTC Shanghai Institute for Advanced Studies, Shanghai 201315, China.
³ The 404 Company Limited China National Nuclear Corporation, Jiayuguan 735100, China.

Abstract

A Circular-Sectorial Phase Segmentation (CSPS) noniterative method for effectively generating and manipulating muti-focus array (MFA) was proposed in this work. The theoretical model of the CSPS was built up based on vectorial diffraction integral and the phase modulation factor was deduced with inverse fast Fourier transform. By segmenting the entrance pupil into specified regions, which were sequentially assigned with the values carried out by phase modulation factor, the methodology could generate flexible MFAs with desired position and morphology. Subsequently, the CSPS was investigated in parallelized fabrication with a laser direct writing system. The positioning accuracy was greater than 96% and the morphologic consistency of the parallelly fabricated results was greater than 92%.

Keywords: modulation factor; multi-focus array; numerical simulation; parallelized laser fabrication; phase segmentation.

Grants and funding

National Major Scientific Research Instrument Development Project of China (Grant No. 51927804); National Natural Science Foundation of China (Grant No. 61378083, 61405159, 11504294); Major Basic Research Program of the National Natural Science Foundation of China (No. 91123030); Science and Technology Innovation Team Project of Shaanxi Province (No. S2018-ZC-TD-0061); Natural Science Foundation of Education Department of Shaanxi Provincial Government (No. 18JK0791); College Student Innovation and Entrepreneurship Training Program of Shaanxi Province (No. S202010697021).