Acute respiratory distress syndrome (ARDS) is a common cause of death in critically ill patients. At present, the pathogenesis of ARDS has not been clarified, which is mainly related to excessive inflammatory response, increased endothelial and epithelial permeability, and decreased alveolar surfactant. In recent years, many studies have shown that mitochondrial DNA (mtDNA) is involved in the occurrence and development of ARDS by inducing inflammation and activating immune response, and has the potential to be used as biomarkers for ARDS. This article reviews the role of mtDNA in the pathogenesis of ARDS, aiming to provide new strategies for the treatment of ARDS, and ultimately reduce the mortality of ARDS patients.