The NIST silicon lattice comparator upgrade

Rev Sci Instrum. 2023 Oct 1;94(10):105103. doi: 10.1063/5.0169355.

Abstract

The NIST silicon lattice comparator has been in service, in various forms, since the 1970s. It is capable of measuring the difference in lattice spacing between specimens of high-quality float-zone silicon to Δd/d ≈ 6 × 10-9. It has recently undergone a thorough update of its control systems and mechanics. These upgrades result in the ability to collect data with improved stability, less settling time of the instrument, and less operator intervention.