1 State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
2 Center of Electron Microscope, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
3 Department of Chemistry, University of Pennsylvania, Philadelphia, PA, 19104-6323, USA.
4 Oden Institute for Computational Engineering and Sciences, The University of Texas at Austin, Austin, Texas, 78712, USA.
5 Key Laboratory for Quantum Materials of Zhejiang Province, Department of Physics, School of Science, Westlake University, Hangzhou, 310024, China.
6 Zhejiang Province Key Laboratory of Quantum Technology and Device, Department of physics, Zhejiang University, Hangzhou, 310027, China.
7 Center for High Pressure Science and Technology Advanced Research, Shanghai, 201203, China.
8 State Key Lab of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100091, China.
9 Institute of Advanced Semiconductors & Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou, 311215, China.
10 Research Center for Intelligent Sensing, Zhejiang Lab, Hangzhou, 311100, China.
11 Center of Electron Microscope, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China. [email protected].
12 State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China. [email protected].
13 Research Center for Intelligent Sensing, Zhejiang Lab, Hangzhou, 311100, China. [email protected].
14 State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China. [email protected].