Defining the zerogap: cracking along the photolithographically defined Au-Cu-Au lines with sub-nanometer precision

Nanophotonics. 2023 Mar 9;12(8):1481-1489. doi: 10.1515/nanoph-2022-0680. eCollection 2023 Apr.

Abstract

Cracks are formed along the photolithographically pre-determined lines with extremely high yield and repeatability, when Cu clusters are introduced between planarized Au thin films sequentially deposited on a PET substrate. These clusters act as nanometer-sized spacers preventing the formation of contiguous metallic bond between the adjacent Au layers which will render prepatterned-cracking impossible. While the effective gap width is initially zero in the optical sense from microwaves all the way to the visible, outer-bending the PET substrate allows the gap width tuning into the 100 nm range, with the stability and controllability in the ranges of 100 s and Angstrom-scale, respectively. It is anticipated that our wafer-scale prepatterned crack technology with an unprecedented mixture of macroscopic length and Angstrom-scale controllability will open-up many applications in optoelectronics, quantum photonics and photocatalysis.

Keywords: metal crack; photolithography; quantum conductance; sub-nanometer; zerogap fabrication.