Extreme Ultraviolet Photoresponse of Organotin-Based Photoresists with Borate Counteranions.
Evrard Q, Sadegh N, Mathew S, Zuidinga E, Watts B, Paradiz Dominguez M, Giglia A, Mahne N, Nannarone S, Nishimura A, Goya T, Sugioka T, Vockenhuber M, Ekinci Y, Brouwer AM.
Evrard Q, et al. Among authors: giglia a.
ACS Appl Mater Interfaces. 2024 Aug 14;16(32):42947-42956. doi: 10.1021/acsami.4c08636. Epub 2024 Aug 5.
ACS Appl Mater Interfaces. 2024.
PMID: 39103240
Free PMC article.