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Atom probe analysis of a 3D finFET with high-k metal gate.
Gilbert M, Vandervorst W, Koelling S, Kambham AK. Gilbert M, et al. Ultramicroscopy. 2011 May;111(6):530-4. doi: 10.1016/j.ultramic.2010.12.025. Epub 2010 Dec 28. Ultramicroscopy. 2011. PMID: 21232861
Atomic insight into Ge₁₋xSnx using atom probe tomography.
Kumar A, Komalan MP, Lenka H, Kambham AK, Gilbert M, Gencarelli F, Vincent B, Vandervorst W. Kumar A, et al. Among authors: gilbert m. Ultramicroscopy. 2013 Sep;132:171-8. doi: 10.1016/j.ultramic.2013.02.009. Epub 2013 Feb 21. Ultramicroscopy. 2013. PMID: 23498554
Atom-probe for FinFET dopant characterization.
Kambham AK, Mody J, Gilbert M, Koelling S, Vandervorst W. Kambham AK, et al. Among authors: gilbert m. Ultramicroscopy. 2011 May;111(6):535-9. doi: 10.1016/j.ultramic.2011.01.017. Epub 2011 Jan 18. Ultramicroscopy. 2011. PMID: 21288644
2,840 results