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Page 1
Status of ITEP decaborane ion source program.
Kulevoy TV, Petrenko SV, Kuibeda RP, Seleznev DN, Koshelev VA, Kozlov AV, Stasevich YB, Sitnikov AL, Shamailov IM, Pershin VI, Hershcovitch A, Johnson BM, Gushenets VI, Oks EM, Poole HP, Masunov ES, Polozov SM. Kulevoy TV, et al. Among authors: gushenets vi. Rev Sci Instrum. 2008 Feb;79(2 Pt 2):02C501. doi: 10.1063/1.2802608. Rev Sci Instrum. 2008. PMID: 18315244
Side extraction duoPIGatron-type ion source.
Gushenets VI, Oks EM, Hershcovitch A, Johnson BM. Gushenets VI, et al. Rev Sci Instrum. 2008 Feb;79(2 Pt 2):02B307. doi: 10.1063/1.2802286. Rev Sci Instrum. 2008. PMID: 18315173
Bernas ion source discharge simulation.
Roudskoy I, Kulevoy TV, Petrenko SV, Kuibeda RP, Seleznev DN, Pershin VI, Hershcovitch A, Johnson BM, Gushenets VI, Oks EM, Poole HP. Roudskoy I, et al. Among authors: gushenets vi. Rev Sci Instrum. 2008 Feb;79(2 Pt 2):02B313. doi: 10.1063/1.2823897. Rev Sci Instrum. 2008. PMID: 18315179
Ion sources for energy extremes of ion implantation.
Hershcovitch A, Johnson BM, Batalin VA, Kropachev GN, Kuibeda RP, Kulevoy TV, Kolomiets AA, Pershin VI, Petrenko SV, Rudskoy I, Seleznev DN, Bugaev AS, Gushenets VI, Litovko IV, Oks EM, Yushkov GY, Masunov ES, Polozov SM, Poole HJ, Storozhenko PA, Svarovski AY. Hershcovitch A, et al. Among authors: gushenets vi. Rev Sci Instrum. 2008 Feb;79(2 Pt 2):02C507. doi: 10.1063/1.2801648. Rev Sci Instrum. 2008. PMID: 18315250
Carborane beam from ITEP Bernas ion source for semiconductor implanters.
Seleznev D, Kropachev G, Kozlov A, Kuibeda R, Koshelev V, Kulevoy T, Hershcovitch A, Jonson B, Poole J, Alexeyenko O, Gurkova E, Oks E, Gushenets V, Polozov S, Masunov E. Seleznev D, et al. Rev Sci Instrum. 2010 Feb;81(2):02B901. doi: 10.1063/1.3258422. Rev Sci Instrum. 2010. PMID: 20192467
20 results