Visible upconversion luminescence of doped bulk silicon for a multimodal wafer metrology.
Afinogenov BI, Sofronov AN, Antropov IM, Filatov NR, Medvedev AS, Shorokhov AS, Mantsevich VN, Maslova NS, Kim T, Jeang E, Kim I, Seo M, Han K, Bae S, Joo W, Yoo H, Bessonov VO, Fedyanin AA, Ryabko MV, Polonsky SV.
Afinogenov BI, et al. Among authors: fedyanin aa.
Opt Lett. 2021 Jul 1;46(13):3071-3074. doi: 10.1364/OL.424834.
Opt Lett. 2021.
PMID: 34197383