Fundamental understanding of chemical processes in extreme ultraviolet resist materials.
Kostko O, Xu B, Ahmed M, Slaughter DS, Ogletree DF, Closser KD, Prendergast DG, Naulleau P, Olynick DL, Ashby PD, Liu Y, Hinsberg WD, Wallraff GM.
Kostko O, et al. Among authors: hinsberg wd.
J Chem Phys. 2018 Oct 21;149(15):154305. doi: 10.1063/1.5046521.
J Chem Phys. 2018.
PMID: 30342450