Breakdown and Protection of ALD Moisture Barrier Thin Films.
Nehm F, Klumbies H, Richter C, Singh A, Schroeder U, Mikolajick T, Mönch T, Hoßbach C, Albert M, Bartha JW, Leo K, Müller-Meskamp L.
Nehm F, et al. Among authors: schroeder u.
ACS Appl Mater Interfaces. 2015 Oct 14;7(40):22121-7. doi: 10.1021/acsami.5b06891. Epub 2015 Sep 30.
ACS Appl Mater Interfaces. 2015.
PMID: 26399760