HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform.
Petra R, Oo SZ, Tarazona A, Cernansky R, Reynolds SA, Khokhar AZ, Mittal V, Thomson DJ, Politi A, Mashanovich GZ, Reed GT, Chong HMH.
Petra R, et al. Among authors: mittal v.
Opt Express. 2019 May 27;27(11):15735-15749. doi: 10.1364/OE.27.015735.
Opt Express. 2019.
PMID: 31163765
Free article.