Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy.
Huang Q, Jia Q, Feng J, Huang H, Yang X, Grenzer J, Huang K, Zhang S, Lin J, Zhou H, You T, Yu W, Facsko S, Jonnard P, Wu M, Giglia A, Zhang Z, Liu Z, Wang Z, Wang X, Ou X.
Huang Q, et al. Among authors: feng j.
Nat Commun. 2019 Jun 4;10(1):2437. doi: 10.1038/s41467-019-10095-2.
Nat Commun. 2019.
PMID: 31164646
Free PMC article.