High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths.
Voronov DL, Ahn M, Anderson EH, Cambie R, Chang CH, Gullikson EM, Heilmann RK, Salmassi F, Schattenburg ML, Warwick T, Yashchuk VV, Zipp L, Padmore HA.
Voronov DL, et al. Among authors: heilmann rk.
Opt Lett. 2010 Aug 1;35(15):2615-7. doi: 10.1364/OL.35.002615.
Opt Lett. 2010.
PMID: 20680076