Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices.
Maurice V, Carlé C, Keshavarzi S, Chutani R, Queste S, Gauthier-Manuel L, Cote JM, Vicarini R, Abdel Hafiz M, Boudot R, Passilly N.
Maurice V, et al. Among authors: boudot r.
Microsyst Nanoeng. 2022 Dec 14;8:129. doi: 10.1038/s41378-022-00468-x. eCollection 2022.
Microsyst Nanoeng. 2022.
PMID: 36533261
Free PMC article.