The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication.
Deinhart V, Kern LM, Kirchhof JN, Juergensen S, Sturm J, Krauss E, Feichtner T, Kovalchuk S, Schneider M, Engel D, Pfau B, Hecht B, Bolotin KI, Reich S, Höflich K.
Deinhart V, et al. Among authors: bolotin ki.
Beilstein J Nanotechnol. 2021 Apr 6;12:304-318. doi: 10.3762/bjnano.12.25. eCollection 2021.
Beilstein J Nanotechnol. 2021.
PMID: 33889477
Free PMC article.