Fabrication of Low Cost and Low Temperature Poly-Silicon Nanowire Sensor Arrays for Monolithic Three-Dimensional Integrated Circuits Applications.
Tang S, Yan J, Zhang J, Wei S, Zhang Q, Li J, Fang M, Zhang S, Xiong E, Wang Y, Yang J, Zhang Z, Wei Q, Yin H, Wang W, Tu H.
Tang S, et al. Among authors: wang w, wang y.
Nanomaterials (Basel). 2020 Dec 11;10(12):2488. doi: 10.3390/nano10122488.
Nanomaterials (Basel). 2020.
PMID: 33322344
Free PMC article.