Neureuther A - Search Results

1

Mechanistic Advantages of Organotin Molecular EUV Photoresists.

Ma JH, Needham C, Wang H, Neureuther A, Prendergast D, Naulleau P. Ma JH, et al. Among authors: neureuther a. ACS Appl Mater Interfaces. 2022 Feb 2;14(4):5514-5524. doi: 10.1021/acsami.1c12411. Epub 2022 Jan 24. ACS Appl Mater Interfaces. 2022. PMID: 35073690 Free article.

2

Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging.

Naulleau PP, Benk M, Goldberg KA, Gullikson EM, Wojdyla A, Wang YG, Neureuther A. Naulleau PP, et al. Among authors: neureuther a. Appl Opt. 2017 Apr 20;56(12):3325-3328. doi: 10.1364/AO.56.003325. Appl Opt. 2017. PMID: 28430243

3

Quantitative phase retrieval with arbitrary pupil and illumination.

Claus RA, Naulleau PP, Neureuther AR, Waller L. Claus RA, et al. Among authors: neureuther ar. Opt Express. 2015 Oct 5;23(20):26672-82. doi: 10.1364/OE.23.026672. Opt Express. 2015. PMID: 26480180 Free article.

4

Modeling of through-focus aerial image with aberration and imaginary mask edge effects in optical lithography simulation.

Yamazoe K, Neureuther AR. Yamazoe K, et al. Among authors: neureuther ar. Appl Opt. 2011 Jul 10;50(20):3570-8. doi: 10.1364/AO.50.003570. Appl Opt. 2011. PMID: 21743568

5

Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks.

Shanker A, Tian L, Sczyrba M, Connolly B, Neureuther A, Waller L. Shanker A, et al. Among authors: neureuther a. Appl Opt. 2014 Dec 1;53(34):J1-6. doi: 10.1364/AO.53.0000J1. Appl Opt. 2014. PMID: 25607976 Free article.

6

Expansion of image interaction by the eigenfunction of the transmission cross coefficient to show the interaction between features.

Yamazoe K, Neureuther AR. Yamazoe K, et al. Among authors: neureuther ar. J Opt Soc Am A Opt Image Sci Vis. 2010 Sep 1;27(9):1920-6. doi: 10.1364/JOSAA.27.001920. J Opt Soc Am A Opt Image Sci Vis. 2010. PMID: 20808398

7

Numerical experiment of the Shannon entropy in partially coherent imaging by Koehler illumination to show the relationship to degree of coherence.

Yamazoe K, Neureuther AR. Yamazoe K, et al. Among authors: neureuther ar. J Opt Soc Am A Opt Image Sci Vis. 2011 Mar 1;28(3):448-54. doi: 10.1364/JOSAA.28.000448. J Opt Soc Am A Opt Image Sci Vis. 2011. PMID: 21383828

8

Self-organized silver nanoparticles for three-dimensional plasmonic crystals.

Tao AR, Ceperley DP, Sinsermsuksakul P, Neureuther AR, Yang P. Tao AR, et al. Among authors: neureuther ar. Nano Lett. 2008 Nov;8(11):4033-8. doi: 10.1021/nl802877h. Epub 2008 Oct 18. Nano Lett. 2008. PMID: 18928325

Save citations to file

Email citations

Send citations to clipboard

Add to Collections

Add to My Bibliography

Create a file for external citation management software

Your saved search

Your RSS Feed

My Custom Filters

Publication date

Text availability

Article attribute

Article type

Article Language

Species

Sex

Age

Other

8 results

Search Page

Filters