AC parallel local oxidation of silicon.
Hemmatian Z, Gentili D, Barbalinardo M, Morandi V, Ortolani L, Ruani G, Cavallini M.
Hemmatian Z, et al. Among authors: ortolani l.
Nanoscale Adv. 2019 Sep 3;1(10):3887-3891. doi: 10.1039/c9na00445a. eCollection 2019 Oct 9.
Nanoscale Adv. 2019.
PMID: 36132101
Free PMC article.