Skip to main page content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Access keys NCBI Homepage MyNCBI Homepage Main Content Main Navigation

Search Page

Filters

My Custom Filters

Publication date

Text availability

Article attribute

Article type

Additional filters

Article Language

Species

Sex

Age

Other

Search Results

4 results

Filters applied: . Clear all
Results are displayed in a computed author sort order. The Publication Date timeline is not available.
Page 1
Resistless EUV lithography: Photon-induced oxide patterning on silicon.
Tseng LT, Karadan P, Kazazis D, Constantinou PC, Stock TJZ, Curson NJ, Schofield SR, Muntwiler M, Aeppli G, Ekinci Y. Tseng LT, et al. Among authors: karadan p. Sci Adv. 2023 Apr 21;9(16):eadf5997. doi: 10.1126/sciadv.adf5997. Epub 2023 Apr 19. Sci Adv. 2023. PMID: 37075116 Free PMC article.