Vertically grown ultrathin Bi2SiO5 as high-κ single-crystalline gate dielectric.
Chen J, Liu Z, Dong X, Gao Z, Lin Y, He Y, Duan Y, Cheng T, Zhou Z, Fu H, Luo F, Wu J.
Chen J, et al. Among authors: he y.
Nat Commun. 2023 Jul 21;14(1):4406. doi: 10.1038/s41467-023-40123-1.
Nat Commun. 2023.
PMID: 37479692
Free PMC article.