Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces.
Gour J, Beer S, Paul P, Alberucci A, Steinert M, Szeghalmi A, Siefke T, Peschel U, Nolte S, Zeitner UD.
Gour J, et al. Among authors: beer s.
Nanophotonics. 2024 Aug 28;13(22):4191-4202. doi: 10.1515/nanoph-2024-0343. eCollection 2024 Sep.
Nanophotonics. 2024.
PMID: 39635445
Free PMC article.