Abnormal Silicon Etching Behaviors in Nanometer-Sized Channels.
Koo K, Chang JH, Ji S, Choi H, Cho SH, Yoo SJ, Choe J, Lee HS, Bae SW, Oh JM, Woo HS, Shin S, Lee K, Kim TH, Jung YS, Kwon JH, Lee JH, Huh Y, Kang S, Kim HY, Yuk JM.
Koo K, et al. Among authors: woo hs.
Nano Lett. 2024 Apr 1. doi: 10.1021/acs.nanolett.4c00326. Online ahead of print.
Nano Lett. 2024.
PMID: 38557080