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Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review
Authors:
Thibault Lechien,
Enrique Dehaerne,
Bappaditya Dey,
Victor Blanco,
Sandip Halder,
Stefan De Gendt,
Wannes Meert
Abstract:
A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical failures and wafer-yield limitations. As nodes and patterns get smaller, even high-resolution imaging techniques such as Scanning Electron Microscopy (SEM) produ…
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A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical failures and wafer-yield limitations. As nodes and patterns get smaller, even high-resolution imaging techniques such as Scanning Electron Microscopy (SEM) produce noisy images due to operating close to sensitivity levels and due to varying physical properties of different underlayers or resist materials. This inherent noise is one of the main challenges for defect inspection. One promising approach is the use of machine learning algorithms, which can be trained to accurately classify and locate defects in semiconductor samples. Recently, convolutional neural networks have proved to be particularly useful in this regard. This systematic review provides a comprehensive overview of the state of automated semiconductor defect inspection on SEM images, including the most recent innovations and developments. 38 publications were selected on this topic, indexed in IEEE Xplore and SPIE databases. For each of these, the application, methodology, dataset, results, limitations and future work were summarized. A comprehensive overview and analysis of their methods is provided. Finally, promising avenues for future work in the field of SEM-based defect inspection are suggested.
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Submitted 18 August, 2023; v1 submitted 16 August, 2023;
originally announced August 2023.
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Neural network approach to reconstructing spectral functions and complex poles of confined particles
Authors:
Thibault Lechien,
David Dudal
Abstract:
Reconstructing spectral functions from propagator data is difficult as solving the analytic continuation problem or applying an inverse integral transformation are ill-conditioned problems. Recent work has proposed using neural networks to solve this problem and has shown promising results, either matching or improving upon the performance of other methods. We generalize this approach by not only…
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Reconstructing spectral functions from propagator data is difficult as solving the analytic continuation problem or applying an inverse integral transformation are ill-conditioned problems. Recent work has proposed using neural networks to solve this problem and has shown promising results, either matching or improving upon the performance of other methods. We generalize this approach by not only reconstructing spectral functions, but also (possible) pairs of complex poles or an infrared (IR) cutoff. We train our network on physically motivated toy functions, examine the reconstruction accuracy and check its robustness to noise. Encouraging results are found on both toy functions and genuine lattice QCD data for the gluon propagator, suggesting that this approach may lead to significant improvements over current state-of-the-art methods.
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Submitted 22 December, 2022; v1 submitted 7 March, 2022;
originally announced March 2022.
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Evolving test instances of the Hamiltonian completion problem
Authors:
Thibault Lechien,
Jorik Jooken,
Patrick De Causmaecker
Abstract:
Predicting and comparing algorithm performance on graph instances is challenging for multiple reasons. First, there is usually no standard set of instances to benchmark performance. Second, using existing graph generators results in a restricted spectrum of difficulty and the resulting graphs are usually not diverse enough to draw sound conclusions. That is why recent work proposes a new methodolo…
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Predicting and comparing algorithm performance on graph instances is challenging for multiple reasons. First, there is usually no standard set of instances to benchmark performance. Second, using existing graph generators results in a restricted spectrum of difficulty and the resulting graphs are usually not diverse enough to draw sound conclusions. That is why recent work proposes a new methodology to generate a diverse set of instances by using an evolutionary algorithm. We can then analyze the resulting graphs and get key insights into which attributes are most related to algorithm performance. We can also fill observed gaps in the instance space in order to generate graphs with previously unseen combinations of features. This methodology is applied to the instance space of the Hamiltonian completion problem using two different solvers, namely the Concorde TSP Solver and a multi-start local search algorithm.
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Submitted 19 November, 2022; v1 submitted 5 October, 2020;
originally announced November 2020.
