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YOLOv8 for Defect Inspection of Hexagonal Directed Self-Assembly Patterns: A Data-Centric Approach
Authors:
Enrique Dehaerne,
Bappaditya Dey,
Hossein Esfandiar,
Lander Verstraete,
Hyo Seon Suh,
Sandip Halder,
Stefan De Gendt
Abstract:
Shrinking pattern dimensions leads to an increased variety of defect types in semiconductor devices. This has spurred innovation in patterning approaches such as Directed self-assembly (DSA) for which no traditional, automatic defect inspection software exists. Machine Learning-based SEM image analysis has become an increasingly popular research topic for defect inspection with supervised ML model…
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Shrinking pattern dimensions leads to an increased variety of defect types in semiconductor devices. This has spurred innovation in patterning approaches such as Directed self-assembly (DSA) for which no traditional, automatic defect inspection software exists. Machine Learning-based SEM image analysis has become an increasingly popular research topic for defect inspection with supervised ML models often showing the best performance. However, little research has been done on obtaining a dataset with high-quality labels for these supervised models. In this work, we propose a method for obtaining coherent and complete labels for a dataset of hexagonal contact hole DSA patterns while requiring minimal quality control effort from a DSA expert. We show that YOLOv8, a state-of-the-art neural network, achieves defect detection precisions of more than 0.9 mAP on our final dataset which best reflects DSA expert defect labeling expectations. We discuss the strengths and limitations of our proposed labeling approach and suggest directions for future work in data-centric ML-based defect inspection.
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Submitted 28 July, 2023;
originally announced July 2023.
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Discovering interpretable elastoplasticity models via the neural polynomial method enabled symbolic regressions
Authors:
Bahador Bahmani,
Hyoung Suk Suh,
WaiChing Sun
Abstract:
Conventional neural network elastoplasticity models are often perceived as lacking interpretability. This paper introduces a two-step machine learning approach that returns mathematical models interpretable by human experts. In particular, we introduce a surrogate model where yield surfaces are expressed in terms of a set of single-variable feature mappings obtained from supervised learning. A pos…
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Conventional neural network elastoplasticity models are often perceived as lacking interpretability. This paper introduces a two-step machine learning approach that returns mathematical models interpretable by human experts. In particular, we introduce a surrogate model where yield surfaces are expressed in terms of a set of single-variable feature mappings obtained from supervised learning. A post-processing step is then used to re-interpret the set of single-variable neural network mapping functions into mathematical form through symbolic regression. This divide-and-conquer approach provides several important advantages. First, it enables us to overcome the scaling issue of symbolic regression algorithms. From a practical perspective, it enhances the portability of learned models for partial differential equation solvers written in different programming languages. Finally, it enables us to have a concrete understanding of the attributes of the materials, such as convexity and symmetries of models, through automated derivations and reasoning. Numerical examples have been provided, along with an open-source code to enable third-party validation.
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Submitted 1 February, 2024; v1 submitted 24 July, 2023;
originally announced July 2023.
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An immersed phase field fracture model for fluid-infiltrating porous media with evolving Beavers-Joseph-Saffman condition
Authors:
Hyoung Suk Suh,
WaiChing Sun
Abstract:
This study presents a phase field model for brittle fracture in fluid-infiltrating vuggy porous media. While the state-of-the-art in hydraulic phase field fracture considers Darcian fracture flow with enhanced permeability along the crack, in this study, the phase field not only acts as a damage variable that provides diffuse representation of cracks or cavities, but also acts as an indicator func…
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This study presents a phase field model for brittle fracture in fluid-infiltrating vuggy porous media. While the state-of-the-art in hydraulic phase field fracture considers Darcian fracture flow with enhanced permeability along the crack, in this study, the phase field not only acts as a damage variable that provides diffuse representation of cracks or cavities, but also acts as an indicator function that separates the domain into two regions where fluid flows are governed by Stokes and Darcy equations, respectively. Since the phase field and its gradient can be respectively regarded as smooth approximations of the Heaviside function and Dirac delta function, our new approach is capable of imposing interfacial transmissibility conditions without explicit interface parametrizations. In addition, the interaction between solid and fluid constituents is modeled by adopting the concept of mixture theory, where the fluid velocities in Stokes and Darcy regions are considered as relative measures compared to the solid motion. This model is particularly attractive for coupled flow analysis in geological materials with complex microstructures undergoing brittle fracture often encountered in energy geotechnics problems, since it completely eliminates the needs to generate specific enrichment function, integration scheme, or meshing algorithm tailored for complex geological features.
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Submitted 11 August, 2020;
originally announced August 2020.
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A phase field model for cohesive fracture in micropolar continua
Authors:
Hyoung Suk Suh,
WaiChing Sun,
Devin O'Connor
Abstract:
While crack nucleation and propagation in the brittle or quasi-brittle regime can be predicted via variational or material-force-based phase field fracture models, these models often assume that the underlying elastic response of the material is non-polar and yet a length scale parameter must be introduced to enable the sharp cracks represented by a regularized implicit function. However, many mat…
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While crack nucleation and propagation in the brittle or quasi-brittle regime can be predicted via variational or material-force-based phase field fracture models, these models often assume that the underlying elastic response of the material is non-polar and yet a length scale parameter must be introduced to enable the sharp cracks represented by a regularized implicit function. However, many materials with internal microstructures that contain surface tension, micro-cracks, micro-fracture, inclusion, cavity or those of particulate nature often exhibit size-dependent behaviors in both the path-independent and path-dependent regimes. This paper is intended to introduce a unified treatment that captures the size effect of the materials in both elastic and damaged states. By introducing a cohesive micropolar phase field fracture theory, along with the computational model and validation exercises, we explore the interacting size-dependent elastic deformation and fracture mechanisms exhibits in materials of complex microstructures. To achieve this goal, we introduce the distinctive degradation functions of the force-stress-strain and couple-stress-micro-rotation energy-conjugated pairs for a given regularization profile such that the macroscopic size-dependent responses of the micropolar continua is insensitive to the length scale parameter of the regularized interface. Then, we apply the variational principle to derive governing equations from the micropolar stored energy and dissipative functionals. Numerical examples are introduced to demonstrate the proper way to identify material parameters and the capacity of the new formulation to simulate complex crack patterns in the quasi-static regime.
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Submitted 11 August, 2020; v1 submitted 3 January, 2020;
originally announced January 2020.
