This study examined covert shifts of attention in infants aged 14, 20, and 26 weeks of age with scalp-recorded event-related potentials (ERPs). The infants were tested in a spatial cuing procedure. The reaction time to localize the target showed covert attention shifts (e.g., response facilitation or inhibition of return depending on cue-target stimulus onset asynchrony). There was a larger P1 ERP component on the valid trials than on the invalid trials or on the no-cue control trials. Presaccadic ERP potentials in response to the target were larger when it was in the cued location than when it was in uncued locations. There were increases from 14 to 26 weeks of age in the amount of inhibition of return, in the post-target-onset P1 effect, and in the presaccadic ERP potentials. These results suggest that cortical development parallels the development of covert orienting of attention and saccade planning in infants in this age range.