Biaxially stretchable "wavy" silicon nanomembranes

Nano Lett. 2007 Jun;7(6):1655-63. doi: 10.1021/nl0706244. Epub 2007 May 8.

Abstract

This Letter introduces a biaxially stretchable form of single crystalline silicon that consists of two dimensionally buckled, or "wavy", silicon nanomembranes on elastomeric supports. Fabrication procedures for these structures are described, and various aspects of their geometries and responses to uniaxial and biaxial strains along various directions are presented. Analytical models of the mechanics of these systems provide a framework for quantitatively understanding their behavior. These classes of materials might be interesting as a route to high-performance electronics with full, two-dimensional stretchability.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Anisotropy
  • Crystallization / methods*
  • Elasticity
  • Macromolecular Substances / chemistry
  • Materials Testing
  • Membranes, Artificial*
  • Molecular Conformation
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Nanotechnology / methods*
  • Particle Size
  • Silicon / chemistry*
  • Stress, Mechanical
  • Surface Properties

Substances

  • Macromolecular Substances
  • Membranes, Artificial
  • Silicon