In this study, we evaluated the surface plasmon characteristics of periodic silver nanodisk structures fabricated on a dielectric thin-film spacer layer on a Ag mirror substrate (NanoDisk on Mirror: NDoM) through finite difference time domain (FDTD) simulations and experiments involving actual sample fabrication. Through FDTD simulations, it was confirmed that the NDoM structure exhibits two sharp peaks in the visible range, and by adjusting the thickness of the spacer layer and the size of the nanodisk structure, sharp peaks can be obtained across the entire visible range. Additionally, we fabricated the NDoM structure using electron beam lithography (EBL) and experimentally confirmed that the obtained peaks matched the simulation results. Furthermore, we discovered that applying annealing at an appropriate temperature to the fabricated structure enables the adjustment of the resonance peak wavelength and enhances the scattering intensity by approximately five times. This enhancement is believed to result from changes in the shape and size of the nanodisk structure, as well as a reduction in grain boundaries in the metal crystal due to annealing. These results have the potential to contribute to technological advancements in various application fields, such as optical sensing and emission enhancement.
Keywords: localized surface plasmon resonance; metamaterials; plasmonics.