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Double-sided structured mask for sub-micron resolution proximity i-line mask-aligner lithography.
Opt Express. 2015 Jun 29;23(13):16628-37. doi: 10.1364/OE.23.016628.
Opt Express. 2015.
PMID: 26191675
Free article.
Deposition of ultra thin CuInS₂ absorber layers by ALD for thin film solar cells at low temperature (down to 150 °C).
Schneider N, Bouttemy M, Genevée P, Lincot D, Donsanti F.
Schneider N, et al. Among authors: genevee p.
Nanotechnology. 2015 Feb 6;26(5):054001. doi: 10.1088/0957-4484/26/5/054001. Epub 2015 Jan 14.
Nanotechnology. 2015.
PMID: 25586382
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