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Page 1
Encapsulation process for diffraction gratings.
Ratzsch S, Kley EB, Tünnermann A, Szeghalmi A. Ratzsch S, et al. Among authors: szeghalmi a. Opt Express. 2015 Jul 13;23(14):17955-65. doi: 10.1364/OE.23.017955. Opt Express. 2015. PMID: 26191855 Free article.
Iridium wire grid polarizer fabricated using atomic layer deposition.
Weber T, Käsebier T, Szeghalmi A, Knez M, Kley EB, Tünnermann A. Weber T, et al. Among authors: szeghalmi a. Nanoscale Res Lett. 2011 Oct 25;6(1):558. doi: 10.1186/1556-276X-6-558. Nanoscale Res Lett. 2011. PMID: 22023700 Free PMC article.
Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study.
Beladiya V , Becker M , Faraz T , Kessels WMME , Schenk P , Otto F , Fritz T , Gruenewald M , Helbing C , Jandt KD , Tünnermann A , Sierka M , Szeghalmi A . Beladiya V , et al. Among authors: szeghalmi a. Nanoscale. 2020 Jan 23;12(3):2089-2102. doi: 10.1039/c9nr07202k. Nanoscale. 2020. PMID: 31912855
Optical bandgap control in Al2O3/TiO2 heterostructures by plasma enhanced atomic layer deposition: Toward quantizing structures and tailored binary oxides.
Paul P, Hafiz MG, Schmitt P, Patzig C, Otto F, Fritz T, Tünnermann A, Szeghalmi A. Paul P, et al. Among authors: szeghalmi a. Spectrochim Acta A Mol Biomol Spectrosc. 2021 May 5;252:119508. doi: 10.1016/j.saa.2021.119508. Epub 2021 Jan 29. Spectrochim Acta A Mol Biomol Spectrosc. 2021. PMID: 33571739
41 results