Sid Mems
Sid Mems
Sensor
Date
Nov 20, 2015 3:53:47 PM
Contents
1. Global.................................................................................................................
1.1. Definitions....................................................................................................
2. Component 1.....................................................................................................
2.1. Definitions....................................................................................................
2.2. Geometry 1..................................................................................................
2.3. Materials......................................................................................................
2.4. Electromechanics.........................................................................................
2.5. Mesh 1.........................................................................................................
3. Study 1...............................................................................................................
3.1. Parametric Sweep........................................................................................
3.2. Stationary....................................................................................................
4. Results...............................................................................................................
4.1. Data Sets.....................................................................................................
4.2. Derived Values.............................................................................................
4.3. Tables...........................................................................................................
4.4. Plot Groups..................................................................................................
1 Global
Used products
COMSOL Multiphysics
CAD Import Module
MEMS Module
1.1 Definitions
1.1.1 Parameters 1
Parameters
Name
Expression
Value
p0
20[kPa]
20000 Pa
Description
2 Component 1
2.1 Definitions
2.1.1 Component Couplings
Average 1
Coupling type
Average
Operator name
aveop1
Integration 1
Coupling type
Integration
Operator name
intop1
2.1.2 Selections
Explicit 1
Selection type
Explicit
Selection
Boundaries 2, 5, 8, 2324
Explicit 2
Selection type
Explicit
Selection
Boundaries 1, 4, 7, 11, 15
Explicit 3
Selection type
Explicit
Selection
Domain 2
Explicit 4
Selection type
Explicit
4
Selection
Domains 15
Difference 1
Selection type
Difference
Selection
Domains 1, 35
Union 1
Selection type
Union
Selection
Boundaries 12, 45, 78, 11, 15, 2324
2.1.3 Coordinate Systems
Boundary System 1
Coordinate system type
Boundary system
Tag
sys1
2.2 Geometry 1
Geometry 1
Units
Length unit
Angular unit
deg
2.3 Materials
2.3.1 Silicon
Silicon
Selection
Domain
Selection
Domains 1, 35
2.3.2 Air
Air
Selection
Domain
Selection
Domain 2
2.4 Electromechanics
Electromechanics
Features
Free Deformation 1
Electrical Material Model 1
Zero Charge 1
Free 2
Electromechanical Interface 1
Prescribed Mesh Displacement 1
Linear Elastic Dielectric 1
Initial Values 1
Linear Elastic Material 1
Symmetry 1
Boundary Load 1
Prescribed Displacement 2
Terminal 1
Ground 1
2.5 Mesh 1
Mesh 1
3 Study 1
3.1 Parametric Sweep
Parameter name
p0
range(0,5000,25000)
3.2 Stationary
Study settings
Property
Value
On
Physics interface
Discretization
Electromechanics (emi)
physics
Mesh selection
Geometry
Mesh
Geometry 1 (geom1)
mesh1
4 Results
4.1 Data Sets
4.1.1 Study 1/Solution 1
Solution
Name
Value
Solution
Solution 1
Component
Name
Value
Data set
Study 1/Solution 1
Expression
Name
Value
Expression
emi.C11
Unit
pF
Description
Capacitance
10
4.3 Tables
4.3.1 Table 1
Global Evaluation 1 (emi.C11)
Table 1
p0
Capacitance (pF)
0.0000
0.0043463
5000.0
0.0043498
10000
0.0043534
15000
0.0043569
20000
0.0043605
25000
0.0043640
11
Global
12
13