Sid Mems

Circular Capacitive Pressure
Sensor
Date
Nov 20, 2015 3:53:47 PM
Contents
1. Global.................................................................................................................
1.1. Definitions....................................................................................................
2. Component 1.....................................................................................................
2.1. Definitions....................................................................................................
2.2. Geometry 1..................................................................................................
2.3. Materials......................................................................................................
2.4. Electromechanics.........................................................................................
2.5. Mesh 1.........................................................................................................
3. Study 1...............................................................................................................
3.1. Parametric Sweep........................................................................................
3.2. Stationary....................................................................................................
4. Results...............................................................................................................
4.1. Data Sets.....................................................................................................
4.2. Derived Values.............................................................................................
4.3. Tables...........................................................................................................
4.4. Plot Groups..................................................................................................
1 Global
Used products
COMSOL Multiphysics
CAD Import Module
MEMS Module
1.1 Definitions
1.1.1 Parameters 1
Parameters
Name
Expression
Value
p0
20[kPa]
20000 Pa
Description
2 Component 1
2.1 Definitions
2.1.1 Component Couplings
Average 1
Coupling type
Average
Operator name
aveop1
Integration 1
Coupling type
Integration
Operator name
intop1
2.1.2 Selections
Explicit 1
Selection type
Explicit
Selection
Boundaries 2, 5, 8, 2324
Explicit 2
Selection type
Explicit
Selection
Boundaries 1, 4, 7, 11, 15
Explicit 3
Selection type
Explicit
Selection
Domain 2
Explicit 4
Selection type
Explicit
4
Selection
Domains 15
Difference 1
Selection type
Difference
Selection
Domains 1, 35
Union 1
Selection type
Union
Selection
Boundaries 12, 45, 78, 11, 15, 2324
2.1.3 Coordinate Systems
Boundary System 1
Coordinate system type
Boundary system
Tag
sys1
2.2 Geometry 1
Geometry 1
Units
Length unit
Angular unit
deg
2.3 Materials
2.3.1 Silicon
Silicon
Selection
Geometric entity level
Domain
Selection
Domains 1, 35
2.3.2 Air
Air
Selection
Geometric entity level
Domain
Selection
Domain 2
2.4 Electromechanics
Electromechanics
Features
Free Deformation 1
Electrical Material Model 1
Zero Charge 1
Free 2
Electromechanical Interface 1
Prescribed Mesh Displacement 1
Linear Elastic Dielectric 1
Initial Values 1
Linear Elastic Material 1
Symmetry 1
Boundary Load 1
Prescribed Displacement 2
Terminal 1
Ground 1
2.5 Mesh 1
Mesh 1
3 Study 1
3.1 Parametric Sweep
Parameter name
Parameter value list
p0
range(0,5000,25000)
3.2 Stationary
Study settings
Property
Value
Include geometric nonlinearity
On
Physics and variables selection
Physics interface
Discretization
Electromechanics (emi)
physics
Mesh selection
Geometry
Mesh
Geometry 1 (geom1)
mesh1
4 Results
4.1 Data Sets
4.1.1 Study 1/Solution 1
Solution
Name
Value
Solution
Solution 1
Component
Save Point Geometry 1
Data set: Study 1/Solution 1
4.2 Derived Values

4.2.1 Global Evaluation 1
Data
Name
Value
Data set
Study 1/Solution 1
Expression
Name
Value
Expression
emi.C11
Unit
pF
Description
Capacitance
10
4.3 Tables
4.3.1 Table 1
Global Evaluation 1 (emi.C11)
Table 1
p0
Capacitance (pF)
0.0000
0.0043463
5000.0
0.0043498
10000
0.0043534
15000
0.0043569
20000
0.0043605
25000
0.0043640
4.4 Plot Groups

4.4.1 Displacement (emi)
p0(6)=25000 Surface: Total displacement (m)
11
4.4.2 Potential (emi)
p0(6)=25000 Slice: Electric potential (V)
4.4.3 1D Plot Group 3
Global
12
4.4.4 1D Plot Group 4
Global: Capacitance (pF)
13

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Circular Capacitive Pressure

Geometric entity level

Geometric entity level

Parameter value list

Include geometric nonlinearity

Physics and variables selection

Save Point Geometry 1

Data set: Study 1/Solution 1

4.2 Derived Values

4.4 Plot Groups

p0(6)=25000 Surface: Total displacement (m)

4.4.2 Potential (emi)

p0(6)=25000 Slice: Electric potential (V)

4.4.3 1D Plot Group 3

4.4.4 1D Plot Group 4

Global: Capacitance (pF)

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