Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition. (Q34521235)
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| Sprache | Label | Description | Also known as |
|---|---|---|---|
| Englisch | Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition. |
scientific article |
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Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition (English)
Ronald Holzwarth
Klaus Hartinger
Tobias Herr
Victor Brasch
Tobias J Kippenberg
1 December 2012